Naintec to develop new focus ring with reduced MTBC

As part of national project

2021-09-28     Jang Keyoung Yoon
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Battery and display production equipment maker Naintec has been chosen to lead a national project to develop new focus rings, which are used in the etching process of wafer fabrication.

The company will aim to develop a focus ring with reduced mean time between cleans in the two-year project given by the Ministry of Trade, Industry and Energy.

Focus rings are commodities used to hold the silicon wafer in place during the etching process. It also maintains uniform plasma density and prevents the sides of wafers from being contaminated.