UPDATED. 2024-06-14 08:17 (금)
Jusung Engineering to launch TSD system
Jusung Engineering to launch TSD system
  • Gijong Lee
  • 승인 2019.01.15 15:52
  • 댓글 0
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Next-gen deposition equipment TSD system released
[Semicon Korea 2019 Exhibitor]
TSD System
TSD System

Jusung Engineering, a semiconductor and display deposition equipment maker, plans to launch TSD (Time Space Divided) system. It is a product that enables high quality thin film deposition optimized for atomic layer deposition.

Jusung's TSD system is capable of implementing thermal atomic layer deposition (ALD), plasma (PE) atomic layer deposition, and IPT(In Cycle Plasma Treament) on a single piece of hardware. In order to uniformly deposit a thin film on a wafer by atomic layer deposition, the source and the reaction gas must not occupy the same space at the same time. The TSD system controls Source, Purge, and Reactant gas exposure in a way that divides time and space. The user can flexibly apply a desired material recipe. The atomic layer deposition process is a technology that has evolved from chemical vapor deposition (CVD), which creates thin films on the wafer to support nanometer-scale circuit line width processes.

Using the TSD system, it is possible to realize high quality film. It can manage next-generation semiconductors of complementary metal oxide semiconductor (CMOS), such as ultra-low-10-nm DRAM and 3D NAND. Also, since the process window is wide, it is possible to keep up with application change and process fine control. This is why Jusung believes that the TSD system is an optimized system for the atomic layer deposition process.

The TSD system can control the step coverage ratio of the thin film deposition process and the stress of the thin film by utilizing the LSP (Local Space Plasma) electrode technology developed by Jusung. High-purity film quality can be precisely realized, which can adapt to the recent miniaturization of semiconductor processes in which the line width becomes narrower and the internal structure of the pattern becomes complicated.

Founded in 1995, Jusung Engineering is headquartered in Gwangju, Gyeonggi Province. In 1995, when the semiconductor device industry was growing rapidly, it succeeded in localizing it by challenging the core equipment market led by foreign advanced companies. Jusung is minimizing the risk of market volatility with its product portfolio of semiconductors, displays, and solar cells. Jusung invests 10-20% in product development every year. Jusung plans to maintain its technological competitiveness through process and hardware innovations and to increase its semiconductor sales by diversifying its product portfolio. It was listed on the KOSDAQ in 1999. In 2017, it recorded sales of 272.7 billion won and an operating profit of 41.2 billion won. Each is up 1.7 percent and 9.3 percent, respectively.

Jusung Engineering
Jusung Engineering


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