Horiba Stec Korea said on Wednesday that it will start manufacturing pressure insensitive mass flow module (MFC) in South Korea in June.
The company, part of Japan’s Horiba Group, said the decision to begin manufacturing D500 series was to participate in South Korea’s move to strengthen its semiconductor material, component and equipment industry.
The move was also aimed at reacting quickly to the expanding South Korean semiconductor market, the company said.
Horiba is aiming to produce 1,000 units per month. The company is strengthening quality management over its Korean subsidiary to ensure that its production ability is level to that of its headquarters.
In 2019, Horiba Group has around 60% market share in the global MFC market. MFC are used to control gas supply during semiconductor production. It is used in the deposition and etching process. D500 series has a sensor that measures the pressure difference in the gas being supplied to control the flow. It has a fast response time and offers precise control, Horiba said.
