UPDATED. 2024-06-14 08:17 (금)
Nextin to begin supplying new EUV equipment ResQ this year
Nextin to begin supplying new EUV equipment ResQ this year
  • Noh Tae Min 기자
  • 승인 2023.06.07 17:57
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Equipment used to remove static electricity
Image: Nextin
Image: Nextin

Nextin’s latest equipment aimed at use in extreme ultraviolet (EUV) process in semiconductor production is expected to be supplied to a customer later this year, TheElec has learned.

The new equipment, called ResQ, will begin testing at a potential customer’s production line this month, sources said.

ResQ is a micro static electricity remover. While most legacy chip processes also see static electricity it is not a serious problem.

However, for advanced processes that use EUV, static electricity can cause defects in wafer patterns, which results in low yield for chip makers. Static electricity is especially prone to occur during thin-film and cleaning processes.

Nextin acquired static electricity remover company Zisys in April and used their technology to develop ResQ.

The potential customer’s wafer was delivered to Nextin’s research lab around March to test ResQ and showed meaningful results, sources said.

If the customer approves, around 20 to 30 units of ResQ are expected to be put in per fab.

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